Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators.

Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the lateral resonances of BAW resonators. Using the precomputed dispersion curves of Lamb waves and an equivalent characteristic impedance for the TE mode, a network of transmission lines is used to calculate the magnitude of field distributions on the electrodes.