The demand for high-performance energy storage devices to power Internet of Things applications has driven intensive research on micro-supercapacitors (MSCs). In this study, RuN films made by magnetron sputtering as an efficient electrode material for MSCs are investigated. The sputtering parameters are carefully studied in order to maximize film porosity while maintaining high electrical conductivity, enabling a fast charging process.
View Article and Find Full Text PDFMicro-supercapacitors emerge as an important electrical energy storage technology expected to play a critical role in the large-scale deployment of autonomous microdevices for health, sensing, monitoring, and other IoT applications. Electrochemical double-layer capacitive storage requires a combination of high surface area and high electronic conductivity, with these being attained only in porous or nanostructured carbons, and recently found also in conducting metal-organic frameworks (MOFs). However, techniques for conformal deposition at micro- and nanoscale of these materials are complex, costly, and hard to upscale.
View Article and Find Full Text PDFFast charging is a critical concern for the next generation of electrochemical energy storage devices, driving extensive research on new electrode materials for electrochemical capacitors and micro-supercapacitors. Here we introduce a significant advance in producing thick ruthenium nitride pseudocapacitive films fabricated using a sputter deposition method. These films deliver over 0.
View Article and Find Full Text PDFMicrosupercapacitors (MSCs) have emerged as the next generation of electrochemical energy storage sources for powering miniaturized embedded electronic and Internet of Things devices. Despite many advantages such as high-power density, long cycle life, fast charge/discharge rate, and moderate energy density, MSCs are not at the industrial level in 2022, while the first MSC was published more than 20 years ago. MSC performance is strongly correlated to electrode material, device configuration, and the used electrolyte.
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