Imido Complexes Derived from the Reactions of Niobium and Tantalum Pentachlorides with Primary Amines: Relevance to the Chemical Vapor Deposition of Metal Nitride Films.

Reactions of niobium and tantalum pentachlorides with tert-butylamine (>/=6 equiv) in benzene afford the dimeric imido complexes [NbCl(2)(N(t)Bu)(NH(t)Bu)(NH(2)(t)Bu)](2) (90%) and [TaCl(2)(N(t)Bu)(NH(t)Bu)(NH(2)(t)Bu)](2) (79%). The niobium complex exists as two isomers in solution, while the tantalum complex is composed of three major isomers and at least two minor isomers. Analogous treatments with isopropylamine (>/=7 equiv) give the monomeric complexes NbCl(2)(N(i)Pr)(NH(i)Pr)(NH(2)(i)Pr)(2) (84%) and TaCl(2)(N(i)Pr)(NH(i)Pr)(NH(2)(i)Pr)(2) (84%).