A survey on the mechanical design for piezo-actuated compliant micro-positioning stages.

This paper presents a comprehensive review of mechanical design and synthesis methods for piezo-actuated compliant micro-positioning stages, which play an important role in areas where high precision motion is required, including bio-robotics, precision manufacturing, automation, and aerospace. Unlike conventional rigid-link mechanisms, the motion of compliant mechanisms is realized by using flexible elements, whereby deformation requires no lubrication while achieving high movement accuracy without friction. As compliant mechanisms differ significantly from traditional rigid mechanisms, recent research has focused on investigating various technologies and approaches to address challenges in the flexure-based micro-positioning stage in the aspects of synthesis, analysis, material, fabrication, and actuation.

Identification of Preisach Model Parameters Based on an Improved Particle Swarm Optimization Method for Piezoelectric Actuators in Micro-Manufacturing Stages.

The Preisach model is a typical scalar mathematical model used to describe the hysteresis phenomena, and it attracts considerable attention. However, parameter identification for the Preisach model remains a challenging issue. In this paper, an improved particle swarm optimization (IPSO) method is proposed to identify Preisach model parameters.

Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators.

Based on the background of atomic force microscope (AFM) driven by piezoelectric actuators (PEAs), this paper proposes a sliding mode control coupled with an inverse Bouc⁻Wen (BW) hysteresis compensator to improve the positioning performance of PEAs. The intrinsic hysteresis and creep characteristics degrade the performance of the PEA and cause accuracy loss. Although creep effect can be eliminated by the closed-loop control approach, hysteresis effects need to be compensated and alleviated by hysteresis compensators.