A multivariate calibration method for mass spectrometry is presented that enables a quantitative analysis of gas mixtures containing interfering gases that contribute to the same mass-to-charge ratios at nominal resolution. Multiple calibration gas mixtures with linearly independent compositions are used in order to obtain the calibration constants for the contribution of each gas to each of the mass-to-charge ratio peaks. The method was successfully applied to the quantitative detection of CO in a mixture with CO and N , which represents a difficulty commonly encountered in heterogeneous catalysis and electrocatalysis research.
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