Biomimetic hierarchical ZnO structure with superhydrophobic and antireflective properties.

A two step method, with a combination of top-down and bottom-up approaches, was developed for the fabrication of ZnO based hierarchical structures with nanorods on microcraters. A layer of well c-axis aligned, transparent, conductive ZnO thin film was deposited by pulsed DC sputtering on a Corning glass substrate. The microcraters were created with anisotropic etching on the as-deposited ZnO thin film.