Preparation of Low-Temperature Solution-Processed High-κ Gate Dielectrics Using Organic-Inorganic TiO Hybrid Nanoparticles.

Organic-inorganic hybrid dielectric nanomaterials are vital for OTFT applications due to their unique combination of organic dielectric and inorganic properties. Despite the challenges in preparing stable titania (TiO) nanoparticles, we successfully synthesized colloidally stable organic-inorganic (O-I) TiO hybrid nanoparticles using an amphiphilic polymer as a stabilizer through a low-temperature sol-gel process. The resulting O-I TiO hybrid sols exhibited long-term stability and formed a high-quality dielectric layer with a high dielectric constant (κ) and minimal leakage current density.