Acoustic reflectivity minimization in Capacitive Micromachined Ultrasonic Transducers (CMUTs).

When Capacitive Micromachined Ultrasonic Transducers (CMUTs) are coupled with water, they show high front-face acoustic reflectivity, due to the impedance mismatch between the transducer substrate material, typically based on silicon, and the propagation medium. During pulse-echo operation, surface reflectivity is responsible for multiple reflections of the received acoustic signals, which result in a set of unwanted echoes. In ultrasound imaging applications, this signal reverberation creates artifacts and reduces the image contrast.

A Low Frequency Broadband Flextensional Ultrasonic Transducer Array.

In this paper, we propose the design and the fabrication of a multicell, piezoelectrically actuated, flextensional transducer array structure, characterized by a low mechanical impedance, thus allowing wideband and high-sensitivity immersion operation in the low ultrasonic frequency range. The transducer structure, consisting of a plurality of circular elementary cells orderly arranged according to a periodic hexagonal tiling, features a high flexibility in the definition of the active area shape and size. We investigate, by finite element modeling (FEM), the influence of different piezoelectric and elastic materials for the flexural plate, for the plate support and for the backing, on the transducer electroacoustic behavior.