AFM-based nanotribological and electrical characterization of ultrathin wear-resistant ionic liquid films.

Ionic liquids (ILs) are considered as lubricants for micro/nanoelectromechanical systems (MEMS/NEMS) due to their excellent thermal and electrical conductivity. So far, only macroscale friction and wear tests have been conducted on these materials. Evaluating the nanoscale tribological performance of ILs when applied as a few nanometers-thick film on a substrate is a crucial step to understand how these novel materials can efficiently lubricate MEMS/NEMS devices.