Effect of Nano-YO Content on Microstructure and Mechanical Properties of Fe18Cr Films Fabricated by RF Magnetron Sputtering.

In this work, FeCr-based films with different YO contents were fabricated using radio frequency (RF) magnetron sputtering. The effects of YO content on their microstructure and mechanical properties were investigated through scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), inductive coupled plasma emission spectrometer (ICP) and a nanoindenter. It was found that the YO-doped FeCr films exhibited a nanocomposite structure with nanosized YO particles uniformly distributed into a FeCr matrix.