Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM.

The potential of X-ray nanotomography hosted in a SEM in presented in this paper. In order to improve the detail detectability of this system, which is directly related to the X-ray source size, thin metal layers have been studied and installed in the equipment. A 3D resolution pattern has been created in order to determine the smallest detectable features by this setup.

Specifications for hard condensed matter specimens for three-dimensional high-resolution tomographies.

Tomography is a standard and invaluable technique that covers a large range of length scales. It gives access to the inner morphology of specimens and to the three-dimensional (3D) distribution of physical quantities such as elemental composition, crystalline phases, oxidation state, or strain. These data are necessary to determine the effective properties of investigated heterogeneous media.

Three-dimensional imaging of copper pillars using x-ray tomography within a scanning electron microscope: a simulation study based on synchrotron data.

While microelectronic devices are frequently characterized with surface-sensitive techniques having nanometer resolution, interconnections used in 3D integration require 3D imaging with high penetration depth and deep sub-micrometer spatial resolution. X-ray tomography is well adapted to this situation. In this context, the purpose of this study is to assess a versatile and turn-key tomographic system allowing for 3D x-ray nanotomography of copper pillars.

[Vascular access for intermittent haemodialysis. Use of a Sparks obturator. Preliminary technical report (author's transl)].

It appears possible to envisage, and especially in patients where the vascular and in particular, venous system is defective, the insertion of a Sparks obturator as soon as the indication for haemodialysis is considered and before is indispensable. In the case of urgent haemodialysis, in most instances the nephrologist himself inserts a Scribner shunt in order to be able to dialyse his patient as rapidly as possible. There is no contraindication to the insertion, either at the same time or during the next few days, of an obturator which may be anastomosed to the vessels much later.