Intrinsically accurate sensing with an optomechanical accelerometer.

We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by the thermal noise response along with an optical frequency comb readout method that enables high sensitivity, high bandwidth, high dynamic range, and SI-traceable displacement measurements. The resulting intrinsic accuracy was evaluated over a wide frequency range by comparing to a primary vibration calibration system and local gravity.

High dynamic range electro-optic dual-comb interrogation of optomechanical sensors.

An interleaved, chirped electro-optic dual comb system is demonstrated for rapid, high dynamic range measurements of cavity optomechanical sensors. This approach allows for the cavity displacements to be interrogated at measurement times as fast as 10 µs over ranges far larger than can be achieved with alternative methods. While the performance of this novel, to the best of our knowledge, readout approach is evaluated with an optomechanical accelerometer, this method has a wide range of applications including temperature, pressure, and humidity sensing as well as acoustics and molecular spectroscopy.