Metalcones: hybrid organic-inorganic films fabricated using atomic and molecular layer deposition techniques.

Hybrid organic-inorganic films can be deposited using atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. A special set of hybrid organic-inorganic films based on metal precursors and various organic alcohols yields metal alkoxide films that can be described as "metalcones." Many metalcone films are possible such as the "alucones" and "zincones" based on the reaction of trimethylaluminum and diethylzinc, respectively, with various organic alcohols such as ethylene glycol (EG).

Protecting polymers in space with atomic layer deposition coatings.

Polymers in space may be subjected to a barrage of incident atoms, photons, and/or ions. Atomic layer deposition (ALD) techniques can produce films that mitigate many of the current challenges for space polymers. We have studied the efficacy of various ALD coatings to protect Kapton polyimide, FEP Teflon, and poly(methyl methacrylate) films from atomic-oxygen and vacuum ultraviolet (VUV) attack.