Wafer-scale fabrication of patterned carbon nanofiber nanoelectrode arrays: a route for development of multiplexed, ultrasensitive disposable biosensors.

One of the major limitations in the development of ultrasensitive electrochemical biosensors based on one-dimensional nanostructures is the difficulty involved with reliably fabricating nanoelectrode arrays (NEAs). In this work, we describe a simple, robust and scalable wafer-scale fabrication method to produce multiplexed biosensors. Each sensor chip consists of nine individually addressable arrays that uses electron beam patterned vertically aligned carbon nanofibers (VACNFs) as the sensing element.