Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structures.

We exploit the localized surface-plasmon resonance (LSPR) of terahertz gold gammadion structures for wafer scale critical dimension metrology of nanostructures. The proposed characterization method, LSPR spectroscopy, is based on optical transmission measurements and is benchmarked against numerical simulations of imprinted structures characterized by atomic force microscopy. There is a fair agreement between the two methods and the simulations enable the translation of optical spectra to critical dimensions of the physical structures, a concept known from scatterometry.

Windowless microfluidic platform based on capillary burst valves for high intensity x-ray measurements.

We propose and describe a microfluidic system for high intensity x-ray measurements. The required open access to a microfluidic channel is provided by an out-of-plane capillary burst valve (CBV). The functionality of the out-of-plane CBV is characterized with respect to the diameter of the windowless access hole, ranging from 10 to 130 microm.