Tunable Electromechanical Properties of a Barium Strontium Titanate Ferroelectric Film Under a Uniaxial Stress.

The possibility of the development of MEMS devices based on the tunable ferroelectric film Ba Sr O properties under uniaxial deformation was studied theoretically. The thermodynamic model of the phase transitions for the film under uniaxial stress was constructed. The behavior of the material constants for the film in various phase states was investigated.