A Proposal for a Novel Surface-Stress Based BioMEMS Sensor Using an Optical Sensing System for Highly Sensitive Diagnoses of Bio-particles.

In this paper, a BioMEMS sensor by using a surface-stress sensing approach, connected to a highly sensitive optical sensing system, is proposed to diagnose various types of biomolecules. The MEMS transducer is composed of a fixed-fixed beam with immobilized receptors on the surface which is connected to a Ring Resonator (RR) filter. The interaction between the target biomolecules and the receptors induces surface stresses on the beam.

Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal.

In this paper, we propose what we believe is a novel sensitive micro-optoelectromechanical systems (MOEMS) accelerometer based on intensity modulation by using a one-dimensional photonic crystal. The optical sensing system of the proposed structure includes an air-dielectric multilayer photonic bandgap material, a laser diode (LD) light source, a typical photodiode (1550 nm) and a set of integrated optical waveguides. The proposed sensor provides several advantages, such as a relatively wide measurement range, good linearity in the whole measurement range, integration capability, negligible cross-axis sensitivity, high reliability, and low air-damping coefficient, which results in a wider frequency bandwidth for a fixed resonance frequency.