A Review on Coupled Bulk Acoustic Wave MEMS Resonators.

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes.

Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm.

This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper.

Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm.

This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory.

Graphene oxide-Au nano particle coated quartz crystal microbalance biosensor for the real time analysis of carcinoembryonic antigen.

A label-free quartz crystal microbalance (QCM) biosensor was developed for the selective and real-time estimation of carcinoembryonic antigen (CEA) through the present study. Graphene oxide-Au nanoparticles (GO-AuNPs) was synthesised on the surface of the QCM electrode and the antibody of CEA (monoclonal anti-CEA from mouse) was covalently immobilized on this layer as the bioreceptor for CEA. Mercaptoacetic acid-EDC-NHS reaction mechanism was used for anti-CEA immobilization.

Love-mode surface acoustic wave devices based on multilayers of TeO/ZnO(112¯0)/Si(100) with high sensitivity and temperature stability.

A multilayer structure of TeO/interdigital transducers (IDTs)/ZnO(112¯0)/Si(100) was proposed and investigated to achieve both high sensitivity and temperature-stability for bio-sensing applications. Dispersions of phase velocities, electromechanical coupling coefficients K, temperature coefficient of delay (TCD) and sensitivity in the multilayer structures were simulated as functions of normalized thicknesses of ZnO (h/λ) and TeO (h/λ) films. The fundamental mode of Love mode (LM) - surface acoustic wave (SAW) shows a larger value of K and higher sensitivity compared with those of the first mode.