Effect of annealing on the interface formation in Mo/Be multilayer structures without/with a barrier layer.

In the present paper, the formation of an interface region in the multilayer periodic Mo/Be structure with/without a BC or Si barrier layer depending on the annealing conditions was studied using X-ray photoelectron spectroscopy. The formation of different beryllides at the interfaces Be-on-Mo and Mo-on-Be was explained by the impact of the deposition-induced exchange caused by ballistic collisions and surface free energy. The influence of the high temperatures on the thermal stability of Mo/Be multilayer systems without/with a barrier layer was studied.