Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping on conductive and nonconductive samples.

Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-microm spatial resolution to the microchemical structures of both conductive and nonconductive samples.

Analysis by laser-induced breakdown spectroscopy of complex solids, liquids, and powders with an echelle spectrometer.

One of the most promising approaches to laser-induced breakdown spectroscopy (LIBS) experiments involves the use of an echelle spectrometer coupled with an intensified CCD. Even if drawbacks remain with its use, the echelle spectrometer facilitates a multielemental analysis that is more rapid than can be obtained with the more-conventional Czerny-Turner spectrometer and, moreover, does not sacrifice reliability. Quantitative results obtained with such apparatus for solids, liquids, powders, and gases are described and when possible compared with results from Czerny-Turner spectrometers.