Wavelength-selective infrared Salisbury screen absorber.

Experimental long wavelength infrared spectral response characterization of a narrowband Salisbury screen absorber suitable for use in microbolometer focal plane arrays is presented. We have demonstrated a microfabricated germanium dielectric support structure layer that replaces the usual silicon nitride structural layer in microbolometers. The fabricated Salisbury screen absorber consists of a chromium resistive sheet as an absorber layer above a germanium dielectric/air-gap/interference structure.