Design and Development of a MOEMS Accelerometer Using SOI Technology.

The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry-Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) MEMS device, which is embedded in a metallic package and connected to an optical fiber.

High focal depth with fractional-power wave fronts.

We explore the use of phase profiles with fractional power for tailoring modulation transfer functions with high focal depth at high pupil apertures. We present numerical simulations of the images that can be obtained with certain fractional-power profiles.