Arguably, SiC technology is the most rapidly expanding IC manufacturing technology driven mostly by the aggressive roadmap for battery electric vehicle penetration and also industrial high-voltage/high-power applications. This paper provides a comprehensive overview of the state of the art of SiC technology focusing on the challenges starting from the difficult and lengthy SiC substrate growth all the way to the complex MOSFET assembly processes. We focus on the differentiation from the established Si manufacturing processes and provide a comprehensive list of references as well as a brief description of our own research into the key manufacturing processes in this technology.
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December 2022
The influence of three coal tar pitches (CTPs), having softening points at 86, 94, and 103 °C, on the thermal behaviour of a defrosted high-volatile coal during co-carbonization and co-pyrolysis was studied. The following research techniques were used: X-raying of the coked charge, TG/FT-IR, ATR and UV spectroscopies, extraction, SEM, STEM, and XRD. It was determined that CTP additives change the structure of the coal plastic layer, the thickness of its zones, and the ordering degree of the structure of semi-cokes to a different extent and independently from their softening points.
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