Mitigating Curtaining Artifacts During Ga FIB TEM Lamella Preparation of a 14 nm FinFET Device.

We report on the mitigation of curtaining artifacts during transmission electron microscopy (TEM) lamella preparation by means of a modified ion beam milling approach, which involves altering the incident angle of the Ga ions by rocking of the sample on a special stage. We applied this technique to TEM sample preparation of a state-of-the-art integrated circuit based on a 14-nm technology node. Site-specific lamellae with a thickness <15 nm were prepared by top-down Ga focused ion beam polishing through upper metal contacts.

Demonstration of unusual nanoantenna array modes through direct reconstruction of the near-field signal.

We perform complex investigation of the distribution of electromagnetic fields in the vicinity of an array of silver nanoantennas, which can operate as an efficient light trapping structure in the visible spectral range. In theory, this array should support unusual collective modes that possess an advantageous distribution of local electric fields, ensuring both strong field localization beneath nanoantennas and a low level of optical losses inside the metal. Using an aperture-type near-field scanning optical microscope (NSOM), we obtain near-field patterns that show excellent agreement with the NSOM signal, directly reconstructed from rigorous numerical simulations using an approach based on the electromagnetic reciprocity theorem.

Tunable optical antennas based on metallic nanoshells with nanoknobs.

We investigate optical properties of a new complex plasmonic nanostructure, which consists of a spherical metallic nanoshell and a small metallic nanoparticle ("nanoknob") situated on its surface. The plasmon resonance wavelength of the entire structure is guided by the geometrical and material properties of the nanoshell whereas the electromagnetic field of the incident light is localized and enhanced near the "nanoknob". The idea is supported with electromagnetic modeling and near-field optical microscopy imaging.