An Analysis of Noise in Multi-Bit ΣΔ Modulators with Low-Frequency Input Signals.

Digital and smart sensors are commonly implemented using multi-bit ΣΔ Modulators. Undesired signals can be present at the ADC input, such as low-frequency signals with medium or high amplitude, as a consequence of mechanical artifacts in the MEMS and/or temporary signal overload. Simulations and measurements of those sensors with such signals show temporary increments of in-band noise power.

A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones.

Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered "always-on" applications increasingly requires a low power consumption. In this paper, we show a new readout circuit approach which is based on a mostly digital Sigma Delta ( Σ Δ ) analog-to-digital converter (ADC).

SNDR Limits of Oscillator-Based Sensor Readout Circuits.

This paper analyzes the influence of phase noise and distortion on the performance of oscillator-based sensor data acquisition systems. Circuit noise inherent to the oscillator circuit manifests as phase noise and limits the SNR. Moreover, oscillator nonlinearity generates distortion for large input signals.