A Method for Accurate Modeling of BAW Filters at High Power Levels.

A novel approach for multiphysics modeling of bulk acoustic wave (BAW) filters is presented allowing accurate and at the same time efficient modeling of BAW filters at high power levels. The approach takes the different types of losses and their spatial distribution into account in order to provide the required input for thermal simulation. The temperature distribution determined by thermal simulation is used to modify the geometry and the layer stack of each single resonator of the filter.

Effect of spatial distribution of dissipated power on modeling of SMR BAW resonators at high power levels.

The modeling of bulk acoustic wave resonators at elevated power levels has been improved by taking the spatial distribution of the dominating loss mechanisms into account. The spatial distribution of the dissipated power enables more accurate modeling of the temperature increase caused by the applied power. Thus, it is also possible to more accurately model the frequency shifts of the resonators' impedance curves resulting from the temperature increase caused by the applied power.