CMUT Electrode Resistance Design: Modelling and Experimental Verification by a Row-Column Array.

This paper addresses the importance of having control over the resistivity of the electrodes for capacitive micromachined ultrasonic transducers (CMUT) devices. The electrode resistivity can vary depending on the fabrication technology used, and resistivity control becomes especially important in the cases where metal electrodes can not be used. This raises the question: When is the resistivity of an electrode sufficiently low? To answer this question we have developed a simple design criterion.