Vapor-Phase Deposition and Electronic Characterization of 3-Aminopropyltriethoxysilane Self-Assembled Monolayers on Silicon Dioxide.

Although organosilanes, especially 3-aminopropyltriethoxysilane (APTES), are commonly used to functionalize oxide substrates for a variety of applications ranging from molecular/biosensors and electronics to protective layers, reliable and controlled deposition of these molecules remains a major obstacle. In this study, we use surface potential analyses to record and optimize the gas-phase deposition of APTES self-assembled monolayers (SAMs) and to determine the resulting change of the electrokinetic potential and charge at the solid?liquid interface when the system is exposed to an electrolyte. Using a gas-phase molecular layer deposition setup with an in situ molecule deposition sensor, APTES is deposited at room temperature onto ozone-activated SiO.