Micromachines (Basel)
October 2024
A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional and new methods of fabricating each material are explained based on the literature, along with the advantages of the new approaches, mainly additive manufacturing, i.
View Article and Find Full Text PDFA millimeter-wave dielectric resonator antenna array with an integrated feeding network and a novel alignment superstrate in Low Temperature Cofired Ceramics (LTCC) technology is presented. The antenna array consists of 16 cylindrical DR antenna (CDRA) elements operating at 28 GHz for mm-Wave 5G applications. The array is fed by an inverted microstrip corporate feeding network designed and built in the same LTCC stack as the resonators.
View Article and Find Full Text PDFImplantable medical devices have been implemented to provide treatment and to assess in vivo physiological information in humans as well as animal models for medical diagnosis and prognosis, therapeutic applications and biological science studies. The advances of micro/nanotechnology dovetailed with novel biomaterials have further enhanced biocompatibility, sensitivity, longevity and reliability in newly-emerged low-cost and compact devices. Close-loop systems with both sensing and treatment functions have also been developed to provide point-of-care and personalized medicine.
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