Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiN/La:HfO/TiN Stacks Grown by PEALD on SiO/Si.

This work reports experimental results of the quantitative determination of oxygen and band gap measurement in the TiN electrodes in planar TiN top/La:HfO/TiN bottom MIM stacks obtained by plasma enhanced atomic layer deposition on SiO. Methodological aspects of extracting structural and chemical information from (scanning) transmission electron microscopy imaging (bright field and high angular annular dark field), energy dispersive X-ray spectrometry and electron energy loss spectroscopy are thoroughly considered. The study shows that the oxygen concentration is higher in the TiNO bottom electrode (about 14.

Uniform arrays of gold nanoelectrodes with tuneable recess depth.

Nanoelectrode arrays are much in demand in electroanalytical chemistry, electrocatalysis, and bioelectrochemistry. One of the promising approaches for the preparation of such systems is templated electrodeposition. In the present study, porous anodic alumina templates are used to prepare Au nanoelectrode arrays.