High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications.

This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode.

Interaction of Acoustic Waves With Spin Waves Using a GHz Operating GaN/Si SAW Device With a Ni/NiFeSi Layer Between Its IDTs.

A two-port surface acoustic wave (SAW) device was developed to be used for the control and excitation via spin waves (SWs). The structure was manufactured using advanced nanolithography techniques, on GaN/Si, enabling fundamental Rayleigh interdigitated transducer (IDT) resonances in the GHz frequency range. The ferromagnetic resonance (FMR) of the magnetostrictive Ni/NiFeSi layer placed between the IDTs of the SAW device can be tuned to the SAW resonance frequency by magnetic fields.

The Behavior of Gold Metallized AlN/Si- and AlN/Glass-Based SAW Structures as Temperature Sensors.

Thin AlN piezoelectric layers have been deposited on high resistivity Si and glass substrates by reactive RF magnetron sputtering, in order to manufacture one-port gigahertz operating surface acoustic wave (SAW)-type resonators to be used as temperature sensors. The growth morphology surface topography, crystallographic structure, and crystalline quality of the AlN layers have been analyzed. Advanced nanolithographic techniques have been used to manufacture structures having interdigitated transducers with fingers and finger interdigit spacing width in the range of 250-170 nm.