Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment.

The paper presents a program for simulating electron scattering in layered materials . Calculations show that the absorbed energy density is three-dimensional, while the contribution of the forward-scattered electrons is better described by a power function rather than the commonly used Gaussian. It is shown that for the practical correction of the proximity effect, it is possible, nevertheless, to use the classical two-dimensional proximity function containing three parameters: α, β, η.