High Q-factor near infrared and visible AlO-based parallel-plate capacitor kinetic inductance detectors.

We designed, fabricated and characterized parallel-plate capacitor lumped-element kinetic inductance detectors (LEKIDs) to operate at near-infrared and optical wavelengths (0.3 -1 μm). The widely used interdigitated capacitor is replaced by a parallel-plate capacitor which, for a given resonance frequency, has a larger capacitance value within a much smaller space allowing to strongly reduce the size of the pixels.