An Ensembled Anomaly Detector for Wafer Fault Detection.

The production process of a wafer in the semiconductor industry consists of several phases such as a diffusion and associated defectivity test, parametric test, electrical wafer sort test, assembly and associated defectivity tests, final test, and burn-in. Among these, the fault detection phase is critical to maintain the low number and the impact of anomalies that eventually result in a yield loss. The understanding and discovery of the causes of yield detractors is a complex procedure of root-cause analysis.