The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer.

This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer's microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements.