Fabrication of multilevel metalenses using multiphoton lithography: from design to evaluation.

We present a procedure for the design of multilevel metalenses and their fabrication with multiphoton-based direct laser writing. This work pushes this fast and versatile fabrication technique to its limits in terms of achievable feature size dimensions for the creation of compact high-numerical aperture metalenses on flat substrates and optical fiber tips. We demonstrate the design of metalenses with various numerical apertures up to 0.