Annealing Optimization of Lithium Cobalt Oxide Thin Film for Use as a Cathode in Lithium-Ion Microbatteries.

The microbatteries field is an important direction of energy storage systems, requiring the careful miniaturization of existing materials while maintaining their properties. Over recent decades, LiCoO has attracted considerable attention as cathode materials for lithium-ion batteries due to its promising electrochemical properties for high-performance batteries. In this work, the thin films of LiCoO were obtained by radio-frequency magnetron sputtering of the corresponding target.