Reflection characteristics of a cavity-resonator-integrated guided-mode resonance mirror for a microdiameter Gaussian beam.

A guided-mode resonance mirror was designed for reflecting a vertically incident Gaussian beam of 3.6-µm beam waist to a backpropagating Gaussian beam. A grating coupler (GC) is integrated in a waveguide resonance cavity consisting of a pair of distributed Bragg reflectors (DBRs) on a reflection substrate.