Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing.

ITO/Mo bilayer thin films were sputtered on n-type silicon and glass substrates and annealed with a Nd:YAG pulsed laser. The structural results show that both the as-deposited and the annealed ITO/Mo thin films have a polycrystalline structure, and that the annealing treatment enhanced the crystallinity of samples. Moreover, the XRD patterns exhibited a cubic structure preferentially oriented along the (222) and (400) planes.

Structural optical and electrical properties of a transparent conductive ITO/Al-Ag/ITO multilayer contact.

Indium tin oxide (ITO) is a widely used material for transparent conductive oxide (TCO) films due to its good optical and electrical properties. Improving the optoelectronic properties of ITO films with reduced thickness is crucial and quite challenging. ITO-based multilayer films with an aluminium-silver (Al-Ag) interlayer (ITO/Al-Ag/ITO) and a pure ITO layer (as reference) were prepared by RF and DC sputtering.