High-speed lateral scanning white-light phase shift interferometry.

In this study, we present lateral scanning white light interferometry (LS-WLI), where phase-shifting algorithms are applied to inspect the topography of a large field of view (FOV) with high-speed measurements. At a point, the interference signal must be acquired with a specific condition to adapt the phase-shifting algorithm. This means that all points have two points, of which the phase difference is π/2, when the number of points acquired in a phase period is multiple of 4, despite increasing the data points in a period.

Automated measurement and analysis of sidewall roughness using three-dimensional atomic force microscopy.

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level.

"Multipoint Force Feedback" Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography.

Nanoscale patterning with massively parallel 2D array tips is of significant interest in scanning probe lithography. A challenging task for tip-based large area nanolithography is maintaining parallel tip arrays at the same contact point with a sample substrate in order to pattern a uniform array. Here, polymer pen lithography is demonstrated with a novel leveling method to account for the magnitude and direction of the total applied force of tip arrays by a multipoint force sensing structure integrated into the tip holder.