Top-orthogonal-to-bottom-electrode (TOBE) CMUT arrays for 3-D ultrasound imaging.

Two-dimensional ultrasound arrays hold great promise for 3-D imaging; however, wiring of each channel becomes impractical for large arrays or for small-footprint catheter probes for which the number of wires must be limited. Capacitive micromachined ultrasound transducers offer a promising solution for such 2-D array applications, but channel routing is still non-trivial. A top-orthogonal-to-bottom-electrode (TOBE) 2-D CMUT array architecture is presented along with row-column addressing schemes for low-channel-count 3-D ultrasound imaging.