Contribution of Ribbon-Structured SiO Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators.

New designs based on S Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO cap layer, or structured SiO elements, showing their performance in the usual terms of electromechanical coupling coefficient (K), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO capping.

AlN/ZnO/LiNbO Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications.

Surface acoustic wave sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications.

Low-Temperature Variation of Acoustic Velocity in PDMS for High-Frequency Applications.

Polydimethylsiloxane (PDMS) and other related silicon-based polymers are among the most widely employed elastomeric materials in microsystems, owing to their physical and chemical properties. Meanwhile, surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors and filters have been vastly explored for sensing and wireless applications. Many fields could benefit from the combined use of acoustic wave devices, and polydimethylsiloxane-based soft-substrates, microsystems, or packaging elements.

AlN/IDT/AlN/Sapphire SAW Heterostructure for High-Temperature Applications.

Recent studies have evidenced that Pt/AlN/Sapphire surface acoustic wave (SAW) devices are promising for high-temperature high-frequency applications. However, they cannot be used above 700°C in air atmosphere as the Pt interdigital transducers (IDTs) agglomerate and the AlN layer oxidizes in such conditions. In this paper, we explore the possibility to use an AlN protective overlayer to concurrently hinder these phenomena.

Legendre and Laguerre polynomial approach for modeling of wave propagation in layered magneto-electro-elastic media.

A numerical method to compute propagation constants and mode shapes of elastic waves in layered piezoelectric-piezomagnetic composites, potentially deposited on a substrate, is described. The basic feature of the method is the expansion of particle displacement, stress fields, electric and magnetic potentials in each layer on different polynomial bases: Legendre for a layer of finite thickness and Laguerre for the semi-infinite substrate. The exponential convergence rate of the method for propagation of Love waves is numerically verified.

New Magnetic Microactuator Design Based on PDMS Elastomer and MEMS Technologies for Tactile Display.

Highly efficient tactile display devices must fulfill technical requirements for tactile stimulation, all the while preserving the lightness and compactness needed for handheld operation. This paper focuses on the elaboration of highly integrated magnetic microactuators for tactile display devices. FEM simulation, conception, fabrication, and characterization of these microactuators are presented in this paper.

Sezawa mode SAW pressure sensors based on ZnO/Si structure.

Surface acoustic wave (SAW) devices have been shown to be suitable for many sensor applications. One of these applications is pressure sensor. In this study we investigate the performance of SAW pressure sensors formed with ZnO/Si(001) structure.