A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices.

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable.

Dependence of the Optical Constant Parameters of p-Toluene Sulfonic Acid-Doped Polyaniline and Its Composites on Dispersion Solvents.

The optical constants of Para-Toluene sulfonic acid-doped polyaniline (PANI), PANIchitosan composites, PANI-reduced graphene-oxide composites and a ternary composite comprising of PANI, chitosan and reduced graphene-oxide dispersed in diluted p-toluene sulfonic acid (PTSA) solution and -Methyl-2-Pyrrolidone (NMP) solvent have been evaluated and compared. The optical constant values were extracted from the absorbance spectra of thin layers of the respective samples. The potential utilization of the materials as the active sensing materials of surface plasmon resonance biosensors has also been assessed in terms of the estimated value of the penetration depth through a dielectric medium.

Fabrication and Characterization of a CMOS-MEMS Humidity Sensor.

This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.