Micromachines (Basel)
January 2023
Using energy harvesting to convert ambient vibrations efficiently to electrical energy has become a worthy concept in recent years. Nevertheless, the low frequencies of the ambient vibrations cannot be effectively converted to power using traditional harvesters. Therefore, a frequency up-conversion harvester is presented to convert the low-frequency vibrations to high-frequency vibrations utilizing magnetic coupling.
View Article and Find Full Text PDFCantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations.
View Article and Find Full Text PDFWe demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clampedâ»clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion.
View Article and Find Full Text PDFUnderstanding the various mechanisms of nonlinear mode coupling in micro and nano resonators has become an imminent necessity for their successful implementation in practical applications. However, consistent, repeatable, and flexible experimental procedures to produce nonlinear mode coupling are lacking, and hence research into well-controlled experimental conditions is crucial. Here, we demonstrate well-controlled and repeatable experiments to study nonlinear mode coupling among micro and nano beam resonators.
View Article and Find Full Text PDFUsing partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped-clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed.
View Article and Find Full Text PDFThe present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics.
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