High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices.

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5 × 10 at high powers and 2 × 10 (with the best value of 4.