We utilize plasma-enhanced atomic layer deposition to synthesize two-dimensional Nb-doped WS and NbWS alloys to expand the range of properties and improve the performance of 2D transition metal dichalcogenides for electronics and catalysis. Using a supercycle deposition process, films are prepared with compositions spanning the range from WS to NbS. While the W-rich films form crystalline disulfides, the Nb-rich films form amorphous trisulfides.
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