Passive vibration compensation in scanning white-light interferometry.

We present a passive vibration compensation approach in scanning white-light interferometry (SWLI). A pointwise distance measuring interferometer (DMI) obtains fast temporal distance changes during the white-light depth-scan of an aerial-measuring Michelson white-light interferometer for topography measurement. Both interferometers share a part of the optical path so that the measurement spot of the DMI is within the field of view of SWLI.