In the rapidly evolving field of plasmonic metasurfaces, achieving homogeneous, reliable, and reproducible fabrication of sub-5 nm dielectric nanogaps is a significant challenge. This article presents an advanced fabrication technology that addresses this issue, capable of realizing uniform and reliable vertical nanogap metasurfaces on a whole wafer of 100 mm diameter. By leveraging fast patterning techniques, such as variable-shaped and character projection electron beam lithography (EBL), along with atomic layer deposition (ALD) for defining a few nanometer gaps with sub-nanometer precision, we have developed a flexible nanofabrication technology to achieve gaps as narrow as 2 nm in plasmonic nanoantennas.
View Article and Find Full Text PDFA circularly polarized (CP) beam propagating in a rotated anisotropic material acquires an additional phase delay proportional to the local rotation angle. This phase delay is a particular kind of geometric phase, the Pancharatnam-Berry phase (PBP), stemming from the path of the beam polarization on the Poincaré sphere. A transverse gradient in the geometric phase can thus be imparted by inhomogeneous rotation of the material, with no transverse gradient in the dynamic phase.
View Article and Find Full Text PDFWe investigate experimentally third harmonic generation (THG) from plasmonic metasurfaces consisting of two-dimensional rectangular lattices of centrosymmetric gold nanobars. By varying the incidence angle and the lattice period, we show how surface lattice resonances (SLRs) at the involved wavelengths are the major contributors in determining the magnitude of the nonlinear effects. A further boost on THG is observed when we excite together more than one SLR, either at the same or at different frequency.
View Article and Find Full Text PDFSecond harmonic generation is enhanced at the surface lattice resonance in plasmonic nanoparticle arrays. We carried out a parametric investigation on two-dimensional lattices composed of gold nanobars where the centrosymmetry is broken at oblique incidence. We study the influence of the periodicity, the incidence angle and the direction of the linear input polarization on the second harmonic generation.
View Article and Find Full Text PDFThe formation of volumetric nanogratings in fused silica by femtosecond laser pulses are shown to afford new opportunities for manipulating the physical shape and tailoring the optical properties of the modification zone by harnessing unconventional beam shapes. The nanograting assembly was observed to rigorously follow the beam elongation effects induced with conical-shaped phase fronts, permitting a scaling up of the writing volume. Detailed optical characterization of birefringence, dichroism, and scattering loss pointed to flexible new ways to tune the macroscopic optical properties, with advantages in decoupling the induced phase retardation from the modification thickness by controlling the conical phase front angle.
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