Optimization of W-band interaction structure developed using three different micro-fabrication techniques.

In this paper, an experimental investigation has been performed for the three different micro-fabrication techniques for optimization in the development process of the W-band planar beam-wave interaction structure. The W-band planar beam-wave interaction structure has been developed using three different micro-fabrication methods, namely micro-EDM (electric discharge milling), wire-EDM, and micro-milling. The effect of each fabrication method on the developed structure is analyzed using scanning electron microscopy and ZETA 3D optical microscopy for their optimization.