Grain size distribution analysis in polycrystalline LiF thin films by mathematical morphology techniques on AFM images and X-ray diffraction data.

The influence of the deposition temperature on the grain size of polycrystalline lithium fluoride (LiF) thin films is studied using a mathematical morphology method. On atomic force microscopy images of the LiF surface, the grain sizes and shapes are determined by applying the watershed technique, together with a shape factor algorithm. Also, the domain size of the film structure, determined by an X-ray diffraction data analysis, is compared and correlated with the mean grain size as a function of the deposition temperature.